1999 Conference 1
2023-08-24
조회 36

Dae-Hwan Kang, Hyeon-Soo Kim, Myung-Jun Chung, Kwang-Ho Ahn, Sang-Tae Chung, Kyoung-Wook Park, Gyu-Seog Cho, Jae-Beom Park, and Yo-Hwan Koh “The Effect of Nitrogen Pre-annealing on the Sidewall Oxidation of WSix and on the Related Electrical Properties of WSix/Poly Si Gate Structure” IEEE 7th International Symposium on the Physical and Failure Analysis of Integrated Circuits IPFA ’99 Singapore pp. 25 – 29 (1999).

Address

Dep. of Semiconductor Engineering, POSTECH 77,

Cheongam-ro, Nam-Gu, Pohang, Gyeongbuk-Do, Korea

(37673)


TEL: +82-54-279-7085

E-mail: daehwankang@postech.ac.kr



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