Kyeong-Keun Choi, Sung-Kyu Kim, Seongjun Kim, Young Jae Park, Woong-Suk Yang, Sung-Woong Han, Dae-Hwan Kang "Impact of ALD Al2O3 Dielectrics on the Device Performance of SiC-Based Field-Effect Transistors (FETs): A Study of Atomic Diffusion." ECS Journal of Solid State Science and Technology 14.2 (2025): 023012.
Address
Dep. of Semiconductor Engineering, POSTECH 77,
Cheongam-ro, Nam-Gu, Pohang, Gyeongbuk-Do, Korea
(37673)
TEL: +82-54-279-7085
E-mail: daehwankang@postech.ac.kr
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Copyright ⓒ 2023. Chalcogenide Semiconductor Lab (CSL)
All rights reserved | Designed by greypixel
Address
Dep. of Semiconductor Engineering, POSTECH 77, Cheongam-ro, Nam-Gu, Pohang, Gyeongbuk-Do, Korea (37673)
TEL: +82-54-279-7085
E-mail: daehwankang@postech.ac.kr
Copyright ⓒ 2023. Chalcogenide Semiconductor Lab (CSL) All rights reserved | Designed by greypixel
